Browsing Electronic Theses and Dissertations from 2009 by Subject "Metal organic"
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Epitaxial growth of p-type doped III-V nitride semiconductor on sapphire substrate using remote plasma metal organic chemical vapor deposition
(2019)Lakehead University Remote Plasma-enhanced Metal Organic Chemical Vapour Deposition (RP-MOCVD) is used to grow III-V nitride semiconductor material. RP-MOCVD use nitrogen plasma as a nitrogen source along with group III ...